• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    An end effector (10) for holding substrates has a multilayer body (14) and a fluid channel (34) provided in the body (14). The base body (14) has at least two layers (40, 42, 44, 66, 68), wherein at least one of the layers (44, 68) is not intrinsically stable.
    公开号:AT519588A2
    申请号:T50058/2018
    申请日:2018-01-24
    公开日:2018-08-15
    发明作者:
    申请人:Suss Microtec Lithography Gmbh；
    IPC主号:
    专利说明:

    Summary
    An end effector (10) for holding substrates has a multilayer base body (14) and a fluid channel (34) which is provided in the base body (14). The base body (14) has at least two layers (40, 42, 44; 66, 68), at least one of the layers (44; 68) not being inherently stable.
    (Fig. 3) / 17
    - 1 The invention relates to an end effector for holding substrates.
    End effectors are the last element in a kinematic chain of transport devices, such as robots. They are used, for example, to grasp or hold objects.
    In the manufacture of microstructure components, for example in chip manufacture, end effectors are usually used to hold substrates in order to move substrates between different process stations.
    In the context of this invention, substrates include, in particular, wafers such as semiconductor or glass wafers, flexible substrates (flexible substrates), wafers artificially produced from chips and potting compound (molded wafers; embedded wafers with embedded dies) or substrates with 3-dimensional surfaces.
    Such end effectors are known and usually consist of a base body with e.g. milled vacuum channel and a cover, which closes the vacuum channel. The wafer can be vacuum-sucked and held through openings in the lid. However, due to their construction, such end effectors have a large thickness and are difficult to manufacture.
    The wafers which are to be picked up by the end effector are often arranged in a wafer cassette. In order to remove individual wafers from the wafer cassette, the end effector is first moved between two wafers in the cassette and is moved or brought up after one of the wafers in order to fix it, for example by means of a vacuum or by means of excess pressure using the Bernoulli effect.
    In order to accommodate as many wafers as possible in a wafer cassette, the wafers are often arranged at a very short distance from one another. Furthermore, wafers can be designed to be flexible and they can sag in a horizontal arrangement, as a result of which the spacing of the wafers from one another can additionally be reduced. Even then, the end effector must be able to be guided securely between the wafers without touching the wafer, for example on the “end face”, and thus damaging it.
    It is therefore an object of the invention to provide an end effector that is particularly thin and easy to manufacture.
    The object is achieved by an end effector for holding substrates, with a base body and a fluid channel which is provided in the base body, the base body having at least two layers, at least one of the layers not being inherently stable.
    / 17th
    - 2 "Not intrinsically stable" means that the position is not stable enough to hold a substrate for which the corresponding end effector is intended in the holding area provided for this purpose. The at least one layer can therefore be made very thin, so that the overall height, i. H. the thickness of the end effector can be reduced. It is even conceivable that several or all layers of the end effector are not designed to be inherently stable and only have the required stability for holding a substrate when they are attached to one another. The layer, which is not inherently stable, can be a thin film, for example, or the end effector can be constructed from several very thin sheets. The fluid channel can serve as a vacuum channel or as an overpressure channel, depending on whether the end effector is to be operated with a compressed air source or a vacuum source.
    In the context of this invention, the term layer means a prefabricated layer, that is to say a prefabricated component in the solid state, which is in particular flat or plate-shaped. Two or more of these prefabricated components can be attached together to form an end effector.
    The prefabricated layer can already have the contour of the end effector or two or more layers are attached to one another and then cut into the desired shape of the end effector.
    A coating or a liquid material that is applied to a prefabricated layer does not form its own “layer” in the sense of this invention, even if it has hardened.
    The end effector can approach substrates both from below and from above and hold or fix them from below or from above.
    A groove and / or a slot, which partially define the fluid channel, is preferably introduced in at least one of the layers, as a result of which the fluid channel can be formed in a simple manner.
    In order to simplify the manufacturing process, the groove and / or the slot can be covered by at least one other of the layers and thus sealed.
    In one embodiment of the invention, the base body has three layers, the middle of the layers being provided with the slot and / or the groove which is covered by the outer two layers, so that the fluid channel is formed. At least one of the outer two layers can be the non-inherently stable layer. A flatter or thinner end effector is thus provided.
    For example, one of the layers, in particular the layer into which the groove and / or the slot is made, is made of sheet metal. The sheet can be made of stainless steel or molybdenum.
    / 17th
    - 3 The sheet can also be made of titanium, aluminum with various coatings or quartz glass. This ensures that the fluid channel always has the desired shape.
    The at least two layers can be congruent to one another and / or have the contour of the end effector, as a result of which the number of assembly steps can be reduced.
    In one embodiment variant, at least one of the at least two layers is a prefabricated component, which simplifies assembly.
    One of the layers, in particular the non-inherently stable layer, is preferably made of a plastic, in particular a plastic film. The plastic is, for example, polyether ether ketone (PEEK). The plastic layer is in particular the top or bottom layer of the base body. This means that the position, which is not inherently stable, can be manufactured cost-effectively and consistently.
    For example, a layer of polyether ether ketone (PEEK) or a comparable plastic that is not inherently stable has a thickness of 0.1 mm or less.
    In order to ensure the tightness of the fluid channel, the at least two layers can be glued together. Alternatively, the at least two layers can also be welded. In addition, the two layers can also be screwed, which further increases the stability of the end effector.
    In one embodiment of the invention, the base body has a receiving end and a fastening end, a holding region being provided at the receiving end for holding the substrate, so that the substrate can be securely held on the end effector.
    A cutout preferably extends from the receiving end into the base body, holding arms being formed by the cutout. The recess can extend through all layers. Thus, with the end effector, substrates can be picked up, which are located approximately in the middle on their underside, for example by holding pins, e.g. on a station in a machine.
    In order to improve the stability of the individual layers and of the entire base body, the recess at its end facing the fastening end can have at least one radius, in particular be U-shaped.
    In one embodiment variant, the fluid channel extends from the fastening end into the holding area, in particular into the holding arms, and opens into openings there. The fluid channel can have a U-shaped section. The vacuum or overpressure required to hold the substrate can be provided by the fluid channel.
    / 17th
    - 4 For example, the legs of the U of the U-shaped section of the fluid channel extend into the holding arms. The fluid channel can be Y-shaped or tuning fork-shaped.
    At least one opening is preferably provided in one of the layers, in particular in one of the holding arms, through which opening the fluid channel opens in the holding area. At least one opening per holding arm can be provided. The opening is provided in the top position. The top or top is the side of the base body against which the substrate lies when the end effector is used as intended.
    In one embodiment of the invention, a holding device is provided in or on the opening, which in particular has a sealing lip, as a result of which the substrate can be securely fixed.
    For example, the holding device is a suction device, in particular a vacuum suction cup, or a fixing device based on the Bernoulli effect. As a result, substrates can be fixed to the end effector either with negative pressure or with positive pressure.
    The suction device can have the sealing lip. The suction device can also have vacuum grooves or grooves and / or a porous material.
    A flange region, in particular a flange plate, can be provided at the fastening end in order to fasten the end effector to a transport device, in particular a robot arm.
    Further advantages and features of the invention will become apparent from the following description and from the accompanying drawings, to which reference is made. The drawings show:
    1 shows an end effector according to the invention in perspective view, which is inserted into a cassette,
    FIG. 2 shows a top view of the end effector according to the invention from FIG. 1,
    3 shows the basic body of the end effector according to the invention according to FIG. 2 in an exploded view,
    FIG. 4 shows a detailed section of the end effector according to the invention in the area of one of the holding devices,
    5 shows an end effector according to the invention of a second embodiment in a bottom view,
    - Figure 6 is a bottom view of the upper layer of the end effector of Figure 5, and / 17
    - 5 - Figure 7 several end effectors according to the invention of different sizes in cassettes for substrates of different sizes.
    FIG. 1 shows an end effector 10 which is inserted into an empty cassette 12 for storing substrates (not shown).
    End effectors 10 are components of robots at the end of a kinematic chain. The end effector 10 shown is a holder or gripper with which substrates such as wafers can be picked up and moved. Accordingly, it can be connected to a robot arm (not shown).
    The end effector 10 has a base body 14 and two holding devices 15, the base body 14 having a receiving end 16 and a fastening end 18.
    At the fastening end 18, a flange region 20 is provided, in which a flange plate 22 is fastened to the base body 14. The flange plate 22 is used to attach the end effector 10 to the robot arm.
    At the receiving end 16, a holding area 24 for holding a substrate (indicated by dashed lines in FIG. 1) is formed on the upper side O of the end effector 10. The center M of a circular substrate is shown in FIG. 2 when the substrate is received in the holding area 24 as intended.
    A recess 26 extends from the receiving end 16 into the base body 14 towards the fastening end 18.
    Starting from the receiving end 16, the recess 26 initially has two parallel side walls 28, which are then connected to one another by a transition region 30. In this first embodiment, the transition region 30 has a radius R1, so that the transition region 30 is semicircular.
    In particular, the recess 26 is a U-shaped recess in the base body 14 on the side of the base body 14 facing away from the fastening end 18.
    Through the recess 26 holding arms 32 are formed on the base body 14, the inner sides of which are the parallel side walls 28.
    A fluid channel 34 is also formed in the base body 14 and runs from the flange region 20, that is to say from the fastening end 18, in the direction of the receiving end 16.
    In the embodiment shown, the fluid channel 34 is a vacuum channel. However, the fluid channel 34 can also be an overpressure channel.
    / 17th
    As can be seen in FIG. 2, the fluid channel 34 starts from the flange region 20 and branches into two branches 36, which extend in the holding region 24 into the holding arms 32.
    The fluid channel 34 is generally tuning fork-shaped or Y-shaped, the two branches 36 forming a U-shaped section of the fluid channel 34. The legs of the U are formed by the parts of the branches 36 which extend into the holding arms 32.
    At the end of the branches 36, an opening 38 is provided in the base body 14, so that the fluid channel 34 opens into the holding area 24 at the top O.
    The holding devices 15 are fastened in the openings 38. Thus, the holding devices 15 can be arranged on the holding arms 32. At least one opening 38 is provided for each holding arm 32.
    FIG. 3 shows an exploded view of the base body 14. In the embodiment shown, the base body 14 has three layers, namely an upper layer 40, a middle layer 42 and a lower layer 44. The upper layer 40 and the lower layer 44 each form an outer layer of the base body 14.
    All these three layers 40, 42, 44 are congruent and are attached to each other. For example, the layers 40, 42, 44 are glued together and can additionally be screwed together. The three layers 40, 42, 44 can also be welded together.
    The recess 26 extends due to the congruence of the layers 40, 42, 44 through all layers 40, 42, 44.
    The lower layer 44 is completely closed, the middle layer 42 has a slot 46 for forming the fluid channel 34, and the upper layer 40 is provided with the two openings 38, but is otherwise also completely closed.
    All layers 40, 42, 44 can additionally have openings for screws.
    For example, the top layer 40 and the middle layer 42 are each made of sheet metal. For example, stainless steel or molybdenum are suitable as materials.
    In any case, the upper layer 40 and the middle layer 42 together have a sufficiently high stability due to the material properties of the sheet metal, so that a substrate could be held in the holding area 24 on these two layers 40, 42. Of course, a substrate with a size for which the entire end effector 10 is designed is assumed.
    The lower layer 44, however, is not inherently stable, i.e. H. that this position is not stable enough to be able to hold a substrate of the appropriate size in the holding area 24 alone.
    / 17th
    - 7 The lower layer 44 can be made of a plastic film. For example, polyether ether ketone (PEEK) is suitable as the plastic.
    For example, the lower layer 44 has a thickness of 0.1 mm or less.
    To form the fluid channel 34, the slot 46 is provided in the middle layer 42, which has the shape of the fluid channel 34. The slot 46 is thus also tuning fork-shaped or Y-shaped.
    In the assembled state of the base body 14, this slot 46 is completely covered and hermetically sealed by the upper layer 40 and the lower layer 44 from above and below, that is to say in the vertical direction (apart from the openings 38 and the connection openings present in the region of the flange plate 22 ).
    The fluid channel 34 ends with the ends of the slot 46 of the middle layer 42 in the regions in which the openings 38 are provided in the uppermost layer 40.
    As can be seen in FIG. 4, one of the holding devices 15 is fastened in the opening 38 shown.
    In the embodiment shown, the holding device 15 is a suction device, in particular a vacuum suction cup, and has a carrier 48 and a sealing lip 50 which is fastened in the carrier 48.
    The carrier 48 has two cylindrical sections, namely a base section 52 and a fastening section 54, the diameter of the fastening section 54 being larger than that of the base section and also larger than the diameter of the opening 38.
    The fastening section 54 has a thickness which essentially corresponds to the thickness of the middle layer 42 and is arranged between the upper layer 40 and the lower layer 44.
    The base portion 52 extends through the opening 38 and has at its upper, i.e.. H. on its side facing away from the fastening section 54, a contact surface 56.
    Suction grooves 60 are provided in the contact surface 56 and are fluidly connected to the fluid channel 34 by means of a through-channel 62 in the carrier 48 and by connecting channels 64 in the fastening section 54.
    The sealing lip 50 is fastened on the upper side O of the base body 14 to the base section 52 and completely surrounds the contact surface 56.
    The carrier 48 is fastened to the end effector 10 in that it is inserted through the middle layer 42 and the upper layer 40 and held there by the lower layer 44. Furthermore, it is fixed by the sealing lip 50, which is supported on the top of the upper layer 40.
    / 17th
    To pick up a substrate, the end effector 10 can be brought up to the substrate from below and then lift the substrate. At the same time, the substrate can be sucked in by a vacuum source (not shown), which can generate a negative pressure in the suction grooves 60 by means of the fluid channel 34, which then acts as a vacuum channel.
    The substrate is then pressed against the contact surface 56 due to the excess pressure from the ambient pressure and is thus securely fixed to the end effector 10. The substrate then lies on the holding area 24 at least on the contact surfaces 56.
    It is also conceivable that the holding device 15 is designed as a fixing device based on the Bernoulli effect. In this case, a gas under excess pressure is supplied to the fluid channel 34 through an overpressure source (not shown), which then flows out of the holding device 15 at high speed and quickly flows past the substrate. This creates a force on the substrate towards the end effector 10, so that the substrate is fixed to the end effector 10. The fluid channel 34 is an overpressure channel in this case.
    In addition, support surfaces 65 can be formed on the holding arms 32, in particular on their end facing the receiving end 16. The contact surfaces 65 can be made of a soft material, for example rubber. In the optimal case, the substrate also lies on the contact surfaces 65 when the substrate is fixed to the end effector 10.
    Although the lower layer 44 is not inherently stable, an overall stable end effector 10 is realized by the multi-layer structure of the base body 14. This is stable enough to be able to transport a substrate of the size provided for this end effector 10 in its holding area 24. Because the lower layer 44 is designed as a thin, not inherently stable film, the overall height of the end effector 10, in particular in the holding area 24, is significantly reduced.
    FIGS. 5 and 6 show a second embodiment of an end effector according to the invention, which essentially corresponds to that of the first embodiment.
    Accordingly, only the differences are dealt with below and the same and functionally identical parts are provided with the same reference symbols.
    The end effector 10 shown in the second embodiment is designed for larger substrates than the end effector 10 of the first embodiment, so that the parts are dimensioned differently in the second embodiment.
    For example, the base body 14 is made wider in order to be able to hold larger substrates more stably due to the larger distance between the contact surfaces 56. At the same time, the recess 26 is also made wider.
    / 17th
    FIG. 5 shows a bottom view of the end effector 10 of the second embodiment, the flange plate 22 being omitted for reasons of clarity.
    In this embodiment, the base body 14 has only two layers, namely an upper layer 66 and a lower layer 68.
    The lower layer 68 corresponds to the lower layer 44 of the first embodiment and is identical to the lower layer 44 of the first embodiment.
    In contrast, the top layer 66 corresponds to a combination of the top layer 40 and the middle layer 42 of the first embodiment.
    In the upper layer 66, a groove 70 is made on its underside, which partially defines the fluid channel 34. The groove 70 corresponds to the slot 46 of the first embodiment, and the groove 70 is closed by the lower layer 66 to form the fluid channel 34.
    In addition, the top layer 66 has the opening 38 of the fluid channel 34 to the top O of the end effector 10.
    The upper layer 66 can also have a recess for the fastening section 54 of the holding device 15.
    For illustration purposes, the lower layer 68 is shown transparently in FIG. 5, so that the groove 70 of the upper layer 66 remains visible.
    In contrast to the first embodiment, the transition region 30 of the recess 26 is no longer designed as a semicircle, but instead has two radii R 2 , each of which describes a quarter circle. The two quarter circles are connected to one another by a short straight section 72 (see FIG. 6).
    Of course, the two features of the embodiments shown can be combined with one another as desired. In particular, the end effector 10 of the first embodiment can have two layers and the end effector of the second embodiment can have three layers.
    It is also conceivable that none of the layers of the base body of an end effector is inherently stable and that the stability required to hold substrates is only achieved by joining these layers together.
    7 shows end effectors 10 in three different sizes with correspondingly large cassettes 12 for substrates. The size shown on the far left corresponds to the size of the first embodiment and the middle size shown corresponds to that of the second embodiment. In addition, an even larger size for particularly large substrates can be seen on the right.
    / 17th
    For example, the left end effector is designed for substrates with a diameter of at least 100 mm, the middle end effector for substrates with a diameter of at least 150 mm and the right end effector for substrates with a diameter of at least 200 mm.
    Of course, depending on the nature of the wafer, the same grippers can also be used for several wafer sizes.
    To produce the end effector, the individual layers can be cut out simultaneously, for example by means of a laser or a water jet. This ensures that the individual layers are made absolutely congruent. Openings which are used for the mechanical connection of several layers can also be produced in one operation for the layers to be connected, if the layers are arranged congruently one above the other.
    / 17th
    权利要求:
    Claims (16)
    [1]
    claims
    1. End effector for holding substrates, with a multi-layer base body (14) and a fluid channel (34) which is provided in the base body (14), the base body (14) having at least two layers (40, 42, 44; 66, 68 ), wherein at least one of the layers (44; 68) is not inherently stable.
    [2]
    2. End effector according to claim 1, characterized in that in at least one of the layers (42; 66) a groove (70) and / or a slot (46) is introduced, which partially defines the fluid channel (34).
    [3]
    3. End effector according to claim 2, characterized in that the groove (70) and / or the slot (46) is covered and sealed by at least one other of the layers (40, 44; 66).
    [4]
    4. End effector according to claim 3, characterized in that the base body (14) has three layers (40, 42, 44), the middle layer (42) of the three layers (40, 42, 44) with the slot (46) is provided, which is covered by the outer two layers (40, 44), so that the fluid channel (34) is formed.
    [5]
    5. End effector according to one of the preceding claims, characterized in that one of the layers (40, 42; 66), in particular the layer (42; 66), in which the groove (70) and / or the slot (46) is introduced , is made of sheet metal.
    [6]
    6. End effector according to one of the preceding claims, characterized in that the at least two layers (40, 42, 44; 66, 68) are congruent to one another and / or have the contour of the end effector (10).
    [7]
    7. End effector according to one of the preceding claims, characterized in that at least one of the at least two layers (40, 42, 44; 66, 68) is a prefabricated component.
    [8]
    8. End effector according to one of the preceding claims, characterized in that one of the layers (44; 68), in particular the non-inherently stable layer (44; 68), is made of a plastic, in particular a plastic film.
    [9]
    9. End effector according to one of the preceding claims, characterized in that the at least two layers (40, 42, 44; 66, 68) are glued together.
    [10]
    10. End effector according to one of the preceding claims, characterized in that the base body (14) has a receiving end (16) and a fastening end (18), a holding region (24) being provided for holding the substrate at the receiving end (16).
    12/17
    [11]
    11. End effector according to claim 10, characterized in that a recess (26) extends into the base body (14) from the receiving end (16), the arm (32) being formed by the recess (26).
    [12]
    12. End effector according to claim 11, characterized in that the recess (26) at its end facing the fastening end (18) has at least one radius (R1; R 2 ), in particular is U-shaped.
    [13]
    13. End effector according to one of claims 10 to 12, characterized in that the fluid channel (34) extends from the fastening end (18) into the holding area (24), in particular into the holding arms (32) and opens there into openings (38) ,
    [14]
    14. End effector according to claim 13, characterized in that a holding device (15) is provided in or on the opening (38), which in particular has a sealing lip (50).
    [15]
    15. End effector according to claim 14, characterized in that the holding device (15) is a suction device, in particular a vacuum suction cup, or a fixing device based on the Bernoulli effect.
    [16]
    16. End effector according to one of claims 10 to 15, characterized in that a flange region (20), in particular a flange plate (22), is provided at the fastening end (18) in order to fasten the end effector (10) to a transport device, in particular a robot arm ,
    13/17
    1.4


    14/17

    15/17
    3.4
    1 Ο
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    同族专利:
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    US9415519B2|2014-07-01|2016-08-16|Varian Semiconductor Equipment Associates, Inc.|Composite end effector and method of making a composite end effector|
    US20160254176A1|2015-02-27|2016-09-01|AZSimilate, LLC|Positive Pressure Bernoulli Wand with Coiled Path|JP2020096032A|2018-12-11|2020-06-18|平田機工株式会社|Substrate transport device|
    FR3112980A1|2020-07-28|2022-02-04|Defitech|Suction box for a gripper|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    NL2018244A|NL2018244B1|2017-01-27|2017-01-27|Endeffektor|
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